Plastic Deformation of Micromachined Silicon Diaphragms with a Sealed Cavity at High Temperatures

Plastic Deformation of Micromachined Silicon Diaphragms with a Sealed Cavity at High Temperatures

Single crystal silicon (SCS) diaphragms are widely used as pressure sensitive elements in micromachined pressure sensors. However, for harsh environments applications, pure silicon diaphragms are hardly used because of the deterioration of SCS in both electrical and mechanical properties. To survive...

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Bibliographic Details
Main Authors: Juan Ren, Michael Ward, Peter Kinnell, Russell Craddock, Xueyong Wei
Format: Article
Language:English
Published: MDPI AG 2016-02-01
Series:Sensors
Subjects:
single crystal silicon
plastic deformation
pressure sensor
microfabrication
Online Access:http://www.mdpi.com/1424-8220/16/2/204

Internet

http://www.mdpi.com/1424-8220/16/2/204

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