A Method to Improve the SGADER Process and Fabricate Ultra-thick Proof Mass Inertial Sensors under the Same DRIE Technique
The Silicon Glass Anodic-bonding and Deep Etching Release (SGADER) is a standardized MEMS process that has been used to fabricate various MEMS devices, especially accelerometers and gyroscopes. However, the height of SGADER structure is limited by the aspect ratio of the DRIE technique. The effect...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2010-04-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | http://www.sensorsportal.com/HTML/DIGEST/april_2010/P_608.pdf |