On the Effects of Package on the PMUTs Performances—Multiphysics Model and Frequency Analyses

On the Effects of Package on the PMUTs Performances—Multiphysics Model and Frequency Analyses

This paper deals with a multiphysics numerical modelling via finite element method (FEM) of an air-coupled array piezoelectric micromachined ultrasonic transducers (PMUTs). The proposed numerical model is fully 3D with the following features: the presence of the fabrication induced residual stresses...

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Bibliographic Details
Main Authors: Gianluca Massimino, Alessandro Colombo, Raffaele Ardito, Fabio Quaglia, Alberto Corigliano
Format: Article
Language:English
Published: MDPI AG 2020-03-01
Series:Micromachines
Subjects:
acoustic-structure interaction
array
flexible package
multiphysics modelling
piezoelectric tranducers
ultrasound
Online Access:https://www.mdpi.com/2072-666X/11/3/307

Internet

https://www.mdpi.com/2072-666X/11/3/307

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