Correlation between the optical bandgap and the monohydride bond density of hydrogenated amorphous silicon
In this study, a variation of the substrate temperature during plasma enhanced chemical vapor deposition of hydrogenated amorphous silicon is reported, which revealed a local minimum of the optical bandgap. It is shown, that the silicon monohydride bond density is more appropriate to describe this d...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2020-03-01
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| Series: | Journal of Non-Crystalline Solids: X |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2590159120300017 |