Dynamic Analysis of a Micro Beam-Based Tactile Sensor Actuated by Fringing Electrostatic Fields
A new kind of fringing electrostatic actuation mode is developed. In this new actuation mode, the expression of fringing electrostatic force is found. The nonlinear dynamic analysis of this new actuation mode is presented by using the Method of Multiple Scales. An experiment is designed to observe t...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2019-05-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/10/5/324 |