Design of a microelectromechanical systems resonant electric field sensor with sensitivity robustness
Studies indicate that driving circuit and drift error in resonance frequency influence the sensitivity of micromechanical resonant electric field sensors. This study proposes an electric field sensor with a comb structure for driving and sensing. A dynamic model is built for the microsensor, which a...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
SAGE Publishing
2015-12-01
|
| Series: | Advances in Mechanical Engineering |
| Online Access: | https://doi.org/10.1177/1687814015619829 |