Angle-dependent sputter yield measurements of keV D ions on W and Fe and comparison with SDTrimSP and SDTrimSP-3D
The influence of surface roughness on the sputter yield was investigated as a function of the angle of incidence. In this work, nm-smooth and rough samples with roughnesses on the µm length scale were produced by depositing thin Fe and W films on smooth and rough Si substrates via magnetron sputteri...
| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2019-01-01
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| Series: | Nuclear Materials and Energy |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2352179118301509 |