In Situ and Real-Time Nanoscale Monitoring of Ultra-Thin Metal Film Growth Using Optical and Electrical Diagnostic Tools

In Situ and Real-Time Nanoscale Monitoring of Ultra-Thin Metal Film Growth Using Optical and Electrical Diagnostic Tools

Continued downscaling of functional layers for key enabling devices has prompted the development of characterization tools to probe and dynamically control thin film formation stages and ensure the desired film morphology and functionalities in terms of, e.g., layer surface smoothness or electrical...

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Bibliographic Details
Main Authors: Jonathan Colin, Andreas Jamnig, Clarisse Furgeaud, Anny Michel, Nikolaos Pliatsikas, Kostas Sarakinos, Gregory Abadias
Format: Article
Language:English
Published: MDPI AG 2020-11-01
Series:Nanomaterials
Subjects:
real-time monitoring
polycrystalline film growth
growth dynamics
interface reactivity
adatom mobility
wafer curvature
Online Access:https://www.mdpi.com/2079-4991/10/11/2225

Internet

https://www.mdpi.com/2079-4991/10/11/2225

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