Transferable Integrated Optical SU8 Devices: From Micronic Waveguides to 1D-Nanostructures

Transferable Integrated Optical SU8 Devices: From Micronic Waveguides to 1D-Nanostructures

We report on optical components for integrated optics applications at the micro- and nanoscale. Versatile shapes and dimensions are achievable due to the liquid phase processability of SU8 resist. On the one hand, by adjusting the UV-lithography process, waveguiding structures are patterned and rele...

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Bibliographic Details
Main Authors: Nolwenn Huby, John Bigeon, Gwennaël Danion, Jean-Luc Duvail, Françis Gouttefangeas, Loïc Joanny, Bruno Bêche
Format: Article
Language:English
Published: MDPI AG 2015-04-01
Series:Micromachines
Subjects:
integrated photonics
1D-nanostructures
optical coupling
transferable waveguide
UV-lithography
wetting template method
Online Access:http://www.mdpi.com/2072-666X/6/5/544

Internet

http://www.mdpi.com/2072-666X/6/5/544

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