Research of Constructive and Technological Methods for Forming a Silicon Disk Resonator with Whispering Gallery Modes

Research of Constructive and Technological Methods for Forming a Silicon Disk Resonator with Whispering Gallery Modes

This article presents the results of a computer simulation of whispering gallery modes in the structure of a silicon disk resonator with a wedge-shaped profile made on a silicon-on-isolator base (SOI). The rationale for the choice of silicon as a material for its manufacturing is given. The results...

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Bibliographic Details
Main Authors: Anastasia Yakuhina, Alexey Kadochkin, Vladimir Amelichev, Dmitry Gorelov, Sergey Generalov
Format: Article
Language:English
Published: MDPI AG 2020-04-01
Series:Photonics
Subjects:
whispering gallery mode
microresonator
silicon disk resonator
wedge-shaped profile
silicon-on-isolator
plasma chemical etching
Online Access:https://www.mdpi.com/2304-6732/7/2/31

Internet

https://www.mdpi.com/2304-6732/7/2/31

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