Design of Piezoresistive MEMS Pressure Sensor Chip for Special Environments
To meet the pressure sensors used in special harsh environments, the MEMS piezoresistive pressure sensor design is proposed that the technology is more mature and more extensive used. The research of Piezoresistive sensor chip is done based on the analysis of sensor principle. The chip substrate mat...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2014-07-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | http://www.sensorsportal.com/HTML/DIGEST/july_2014/Vol_174/P_2168.pdf |