Coupled vibration of driving sections for an electromechanical integrated harmonic piezodrive system
An electromechanical integrated harmonic piezodrive system was developed that elicits fast responses with nanoscale accuracy and large torque density. The operating principle of the drive system is discussed and its dynamic equations are deduced. Coupled with boundary conditions and continuity condi...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2014-03-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.4867476 |