Examination of smooth surfaces roughness using angle scatterometer. Part 2. The experimental procedure. The measurement results of chosen surfaces

Examination of smooth surfaces roughness using angle scatterometer. Part 2. The experimental procedure. The measurement results of chosen surfaces

The experimental procedure for measurements of smooth surface roughness parameters using automated angle scatterometer, built at the Institute of Optoelectronics (IOE), is described. The results of measurements and their analysis for three chosen polished surfaces: silicon, germanium, and stainless...

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Bibliographic Details
Main Author: Andrzej Pawlata
Format: Article
Language:English
Published: Wojskowa Akademia Techniczna, Redakcja Wydawnictw WAT, ul. gen. S. Kaliskiego 2, 00-908 Warszawa 2015-03-01
Series:Biuletyn Wojskowej Akademii Technicznej
Subjects:
surface roughness
scattering
BSDF function
signature
scatterometer
Online Access:http://biuletynwat.pl/icid/1145432

Internet

http://biuletynwat.pl/icid/1145432

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