Instability of Contact Resistance in MEMS and NEMS DC Switches under Low Force: the Role of Alien Films on the Contact Surface
The metal contact is one of the most crucial parts in ohmic-contact microelectromechanical (MEMS) switches, as it determines the device performance and reliability. It has been observed that there is contact instability when the contact force is below a threshold value (minimum contact force). Howev...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2013-11-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | http://www.mdpi.com/1424-8220/13/12/16360 |