Electromechanical Dynamics for Micro Film

In this paper, an electromechanical coupled dynamic model of the micro film subjected to electrostatic force is presented and its electromechanical coupled dynamic equation is given. By the equation, the natural frequencies and vibration modes of the micro film are investigated. The forced responses...

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Bibliographic Details
Main Authors: Lizhong Xu, Xiaorui Fu
Format: Article
Language:English
Published: IFSA Publishing, S.L. 2014-08-01
Series:Sensors & Transducers
Subjects:
Online Access:http://www.sensorsportal.com/HTML/DIGEST/august_2014/Vol_176/P_2267.pdf