Electromechanical Dynamics for Micro Film
In this paper, an electromechanical coupled dynamic model of the micro film subjected to electrostatic force is presented and its electromechanical coupled dynamic equation is given. By the equation, the natural frequencies and vibration modes of the micro film are investigated. The forced responses...
Main Authors: | , |
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Format: | Article |
Language: | English |
Published: |
IFSA Publishing, S.L.
2014-08-01
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Series: | Sensors & Transducers |
Subjects: | |
Online Access: | http://www.sensorsportal.com/HTML/DIGEST/august_2014/Vol_176/P_2267.pdf |