Equivalent Circuit Model of an Optomechanical MEMS Electric Field Strength Sensor
We present a simple equivalent circuit model for the transfer function of an optomechanical MEMS transducer capable of distortion-free electric field strength measurements. This model allows not only to qualitatively understand the characteristics of the transducer but also takes into account parasi...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2018-12-01
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| Series: | Proceedings |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2504-3900/2/13/712 |