Monolithic integration of GaAs p–i–n photodetectors grown on 300 mm silicon wafers
Vertical GaAs p–i–n photodetectors epitaxially grown on GaAs(001), Ge/Si(001), and Si(001) substrates are reported. The performances of such photodetectors were investigated as a function of threading dislocation density in the stacks. A low dark current at room temperature, below 100 pA up to −9 V...
Main Authors: | , , , , , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
AIP Publishing LLC
2020-12-01
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Series: | AIP Advances |
Online Access: | http://dx.doi.org/10.1063/5.0030677 |