Analysis of Static and Dynamic Properties of Micromirror with the Application of Response Surface Method

The paper presents the results of an application of response surface method to aid the analysis of variation of static and dynamic properties of micromirror. The multiphysics approach was taken into account to elaborate finite element model of electrostatically actuated microdevice and coupled analy...

Full description

Bibliographic Details
Main Authors:	A Martowicz, A Klepka, T Uhl
Format:	Article
Language:	English
Published:	Multi-Science Publishing 2016-09-01
Series:	International Journal of Multiphysics
Online Access:	http://journal.multiphysics.org/index.php/IJM/article/view/199

id	doaj-a1dca39185f34dc7887883fb9b4698c8
record_format	Article
spelling	doaj-a1dca39185f34dc7887883fb9b4698c82020-11-24T22:20:45ZengMulti-Science PublishingInternational Journal of Multiphysics1750-95482048-39612016-09-016210.1260/1750-9548.6.2.115211Analysis of Static and Dynamic Properties of Micromirror with the Application of Response Surface MethodA Martowicz0A Klepka1T Uhl2AGH University of Science and Technology, Faculty of Mechanical Engineering and Robotics, Department of Robotics and Mechatronics, al. A. Mickiewicza 30, 30-059 Krakow, PolandAGH University of Science and Technology, Faculty of Mechanical Engineering and Robotics, Department of Robotics and Mechatronics, al. A. Mickiewicza 30, 30-059 Krakow, PolandAGH University of Science and Technology, Faculty of Mechanical Engineering and Robotics, Department of Robotics and Mechatronics, al. A. Mickiewicza 30, 30-059 Krakow, PolandThe paper presents the results of an application of response surface method to aid the analysis of variation of static and dynamic properties of micromirror. The multiphysics approach was taken into account to elaborate finite element model of electrostatically actuated microdevice and coupled analyses were carried out to yield the results. Used procedure of metamodel fitting is described and its quality is discussed. Elaborated approximations were used to perform the sensitivity analysis as well as to study the propagation of variation introduced by uncertain and control parameters. The input parameters deal with geometry, material properties and control voltage. As studied output characteristics there were chosen the resultant static vertical displacement of reflecting surfaces and the resonance frequency related to the first normal mode of vibration.http://journal.multiphysics.org/index.php/IJM/article/view/199
collection	DOAJ
language	English
format	Article
sources	DOAJ
author	A Martowicz A Klepka T Uhl
spellingShingle	A Martowicz A Klepka T Uhl Analysis of Static and Dynamic Properties of Micromirror with the Application of Response Surface Method International Journal of Multiphysics
author_facet	A Martowicz A Klepka T Uhl
author_sort	A Martowicz
title	Analysis of Static and Dynamic Properties of Micromirror with the Application of Response Surface Method
title_short	Analysis of Static and Dynamic Properties of Micromirror with the Application of Response Surface Method
title_full	Analysis of Static and Dynamic Properties of Micromirror with the Application of Response Surface Method
title_fullStr	Analysis of Static and Dynamic Properties of Micromirror with the Application of Response Surface Method
title_full_unstemmed	Analysis of Static and Dynamic Properties of Micromirror with the Application of Response Surface Method
title_sort	analysis of static and dynamic properties of micromirror with the application of response surface method
publisher	Multi-Science Publishing
series	International Journal of Multiphysics
issn	1750-9548 2048-3961
publishDate	2016-09-01
description	The paper presents the results of an application of response surface method to aid the analysis of variation of static and dynamic properties of micromirror. The multiphysics approach was taken into account to elaborate finite element model of electrostatically actuated microdevice and coupled analyses were carried out to yield the results. Used procedure of metamodel fitting is described and its quality is discussed. Elaborated approximations were used to perform the sensitivity analysis as well as to study the propagation of variation introduced by uncertain and control parameters. The input parameters deal with geometry, material properties and control voltage. As studied output characteristics there were chosen the resultant static vertical displacement of reflecting surfaces and the resonance frequency related to the first normal mode of vibration.
url	http://journal.multiphysics.org/index.php/IJM/article/view/199
work_keys_str_mv	AT amartowicz analysisofstaticanddynamicpropertiesofmicromirrorwiththeapplicationofresponsesurfacemethod AT aklepka analysisofstaticanddynamicpropertiesofmicromirrorwiththeapplicationofresponsesurfacemethod AT tuhl analysisofstaticanddynamicpropertiesofmicromirrorwiththeapplicationofresponsesurfacemethod
_version_	1725774117215404032

Analysis of Static and Dynamic Properties of Micromirror with the Application of Response Surface Method

Similar Items