Analysis of Static and Dynamic Properties of Micromirror with the Application of Response Surface Method
The paper presents the results of an application of response surface method to aid the analysis of variation of static and dynamic properties of micromirror. The multiphysics approach was taken into account to elaborate finite element model of electrostatically actuated microdevice and coupled analy...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Multi-Science Publishing
2016-09-01
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| Series: | International Journal of Multiphysics |
| Online Access: | http://journal.multiphysics.org/index.php/IJM/article/view/199 |