Morphological Evolution of Pit-Patterned Si(001) Substrates Driven by Surface-Energy Reduction

Abstract Lateral ordering of heteroepitaxial islands can be conveniently achieved by suitable pit-patterning of the substrate prior to deposition. Controlling shape, orientation, and size of the pits is not trivial as, being metastable, they can significantly evolve during deposition/annealing. In t...

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Bibliographic Details
Main Authors: Marco Salvalaglio, Rainer Backofen, Axel Voigt, Francesco Montalenti
Format: Article
Language:English
Published: SpringerOpen 2017-09-01
Series:Nanoscale Research Letters
Subjects:
Online Access:http://link.springer.com/article/10.1186/s11671-017-2320-5