An Efficient Analytical Approach to Visualize Text-Based Event Logs for Semiconductor Equipment
Semiconductor equipment consists of a complex system in which numerous components are organically connected and controlled by many controllers. EventLog records all the information available during system processes. Because the EventLog records system runtime information so developers and engineers...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-06-01
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| Series: | Applied Sciences |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-3417/11/13/5944 |