Silicon-Micromachined Gas Chromatographic Columns for the Development of Portable Detection Device

Silicon-Micromachined Gas Chromatographic Columns for the Development of Portable Detection Device

We report the fabrication of a gas chromatographic column module integrated on a silicon substrate and usable as a portable measurement device dedicated to the selective detection of various chemical compounds (gas or vapour). PDMS, PEG, and F13-TEOS stationary phases have been prepared in order to...

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Bibliographic Details
Main Authors:	Jean-Baptiste Sanchez, Aline Schmitt, Franck Berger, Christophe Mavon
Format:	Article
Language:	English
Published:	Hindawi Limited 2010-01-01
Series:	Journal of Sensors
Online Access:	http://dx.doi.org/10.1155/2010/409687

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