Silicon-Micromachined Gas Chromatographic Columns for the Development of Portable Detection Device
We report the fabrication of a gas chromatographic column module integrated on a silicon substrate and usable as a portable measurement device dedicated to the selective detection of various chemical compounds (gas or vapour). PDMS, PEG, and F13-TEOS stationary phases have been prepared in order to...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Hindawi Limited
2010-01-01
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| Series: | Journal of Sensors |
| Online Access: | http://dx.doi.org/10.1155/2010/409687 |