Design, Fabrication and Test of a Low Range Capacitive Accelerometer With Anti-Overload Characteristics
Capacitive accelerometers have been widely used in the fields of mobile phones, automobiles, seismic monitoring and others because of its high sensitivity, good repeatability and high precision. This type of accelerometer usually has a low range. The sensitive structure of the sensor is too vulnerab...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2020-01-01
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| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/8981941/ |