Suppression of Back-Reflection From the End Face of Si<sub>3</sub>N<sub>4</sub> Waveguide Resonator

Suppression of Back-Reflection From the End Face of Si<sub>3</sub>N<sub>4</sub> Waveguide Resonator

Silicon nitride waveguide (Si<sub>3</sub>N<sub>4</sub>), is used as the most important sensitive device because of its excellent high-polarizing characteristics. It has the potential to build the miniaturized, high-precision resonant integrated optical gyroscope (RIOG) in rec...

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Bibliographic Details
Main Authors: Changkun Feng, Danni Liu, Peiren Ni, Hui Li, Lishuang Feng
Format: Article
Language:English
Published: IEEE 2021-01-01
Series:IEEE Access
Subjects:
Back-reflection
integrated optical gyroscopes
oblique cut
silicon nitride waveguides
Online Access:https://ieeexplore.ieee.org/document/9354769/

Internet

https://ieeexplore.ieee.org/document/9354769/

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