Energy Loss in a MEMS Disk Resonator Gyroscope

Energy Loss in a MEMS Disk Resonator Gyroscope

Analysing and minimizing energy loss is crucial for high performance disk resonator gyroscopes (DRGs). Generally, the primary energy loss mechanism for high vacuum packaged microelectromechanical system (MEMS) resonators includes thermoelastic damping, anchor loss, and electronic damping. In this pa...

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Bibliographic Details
Main Authors: Jianbing Xie, Yongcun Hao, Weizheng Yuan
Format: Article
Language:English
Published: MDPI AG 2019-07-01
Series:Micromachines
Subjects:
disk resonator gyroscope (DRG)
quality factor (Q)
energy loss
thermoelastic damping
anchor loss
electronic damping
Online Access:https://www.mdpi.com/2072-666X/10/8/493

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https://www.mdpi.com/2072-666X/10/8/493

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