Reducing Pull-In Voltage by Adjusting Gap Shape in Electrostatically Actuated Cantilever and Fixed-Fixed Beams
A gap with variable geometry is presented for both cantilever beam and fixed-fixed beam actuators as a method to reduce the pull-in voltage while maintaining a required displacement. The method is applicable to beams oriented either in a plane parallel to or perpendicular to a substrate, but is most...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2010-07-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | http://www.mdpi.com/2072-666X/1/2/68/ |