A theoretical model and analysis of composite membrane of a piezoresistive pressure sensor
In this paper, an analytical model of the composite membrane piezoresistive pressure sensor with the testing structure is established, which built the relationship between the electrostatic force and the material properties, dimension parameters of the sensor. By using the theoretical model of the s...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2016-10-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.4964661 |