Production Strategies of TiN<sub>x</sub> Coatings via Reactive High Power Impulse Magnetron Sputtering for Selective H<sub>2</sub> Separation

Production Strategies of TiN<sub>x</sub> Coatings via Reactive High Power Impulse Magnetron Sputtering for Selective H<sub>2</sub> Separation

This scientific work aims to optimize the preparation of titanium nitride coatings for selective H<sub>2</sub> separation using the Reactive High Power Impulse Magnetron Sputtering technology (RHiPIMS). Currently, nitride-based thin films are considered promising membranes for hydrogen....

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Bibliographic Details
Main Authors: Cecilia Mortalò, Silvia Maria Deambrosis, Francesco Montagner, Valentina Zin, Monica Fabrizio, Luca Pasquali, Raffaella Capelli, Monica Montecchi, Enrico Miorin
Format: Article
Language:English
Published: MDPI AG 2021-05-01
Series:Membranes
Subjects:
TiN<sub>x</sub> film membranes
high power impulse magnetron sputtering
chemical robustness under h<sub>2</sub>
porous ceramic substrates
Online Access:https://www.mdpi.com/2077-0375/11/5/360

Internet

https://www.mdpi.com/2077-0375/11/5/360

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