Thin-Entrance Window Process for Soft X-Ray Sensors

Thin-Entrance Window Process for Soft X-Ray Sensors

New free electron lasers, such as SLAC’s LCLS-II, will provide unique scientific imaging opportunities. In order to fully utilize these facilities, we need to develop detectors with shallow entrance windows that will enable detection of soft x-rays from 250 eV to 1.5 KeV. Achieving adequately shallo...

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Bibliographic Details
Main Authors: Julie Segal, Christopher Kenney, Jeffrey M. Kowalski, Jeffrey E. Kowalski, Gabriel Blaj, Lisa Rozario, Jasmin Hasi, Angelo Dragone, Pietro Caragiulo, Lorenzo Rota
Format: Article
Language:English
Published: Frontiers Media S.A. 2021-03-01
Series:Frontiers in Physics
Subjects:
silicon sensors
x-ray sensors
micro-wave anneal
soft x-rays
silicon processing
Online Access:https://www.frontiersin.org/articles/10.3389/fphy.2021.618390/full

Internet

https://www.frontiersin.org/articles/10.3389/fphy.2021.618390/full

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