Structure, optical and electrical properties of Nb-doped ZnO transparent conductive thin films prepared by co-sputtering method
Nb-doped ZnO thin films were fabricated on glass substrates by using co-sputtering with direct-current and radio frequency magnetron sputtering. The structures, optical and electrical performances of Nb-doped ZnO thin films were investigated. The results showed that all thin films have (0 0 2) c-axi...
| Main Authors: | , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
World Scientific Publishing
2019-12-01
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| Series: | Journal of Advanced Dielectrics |
| Subjects: | |
| Online Access: | http://www.worldscientific.com/doi/pdf/10.1142/S2010135X19500486 |