Design of a test structure based on chevron-shaped thermal actuator for in-situ measurement of the fracture strength of MEMS thin films

Design of a test structure based on chevron-shaped thermal actuator for in-situ measurement of the fracture strength of MEMS thin films

A novel test structure to characterize the fracture strength of MEMS (Micro-electro-Mechanical Systems) thin films is presented. The test structure is comprised of a micro fabricated chevron-shaped thermal actuator and test specimen. The test structure is capable of producing large displacement and...

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Bibliographic Details
Main Authors: Mengjie Li, Zaifa Zhou, Liyan Yi, Xijie Wang, Saeed Adnan
Format: Article
Language:English
Published: AIP Publishing LLC 2019-12-01
Series:Nanotechnology and Precision Engineering
Online Access:http://www.sciencedirect.com/science/article/pii/S2589554019300340

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http://www.sciencedirect.com/science/article/pii/S2589554019300340

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