Thickness and roughness measurements of nano thin films by interference
In the standard optical interference fringes approach, by measuring shift of the interference fringes due to step edge of thin film on substrate, thickness of the layer has already been measured. In order to improve the measurement precision of this popular method, the interference fringes intensity...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Isfahan University of Technology
2011-06-01
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| Series: | Iranian Journal of Physics Research |
| Subjects: | |
| Online Access: | http://ijpr.iut.ac.ir/browse.php?a_code=A-10-1-508&slc_lang=en&sid=1 |