Mid-infrared autocollimation for linear motion error measurement
It is known that linear motion errors for linear guides can be measured by the autocollimation method. In this case, it is necessary to install a mirror on the measurement target. On the other hand, if a light with a wavelength sufficiently longer than that of the surface roughness of the measuremen...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2021-12-01
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| Series: | Measurement: Sensors |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2665917421002282 |