A new failure mechanism of electromigration by surface diffusion of Sn on Ni and Cu metallization in microbumps

Abstract Microbumps in three-dimensional integrated circuit now becomes essential technology to reach higher packaging density. However, the small volume of microbumps dramatically changes the characteristics from the flip-chip (FC) solder joints. For a 20 µm diameter microbump, the cross-section ar...

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Bibliographic Details
Main Authors: Yuan-Wei Chang, Chia-chia Hu, Hsin-Ying Peng, Yu-Chun Liang, Chih Chen, Tao-chih Chang, Chau-Jie Zhan, Jing-Ye Juang
Format: Article
Language:English
Published: Nature Publishing Group 2018-04-01
Series:Scientific Reports
Online Access:https://doi.org/10.1038/s41598-018-23809-1