Study for Laser Controlled Fabrication of Micro/Nano-Structures of Silicon Based on Multi-Physics Model
This work proposes a detailed process of micro/nano-structure surface modification in relation to temperature field. In this paper, a femtosecond laser is used to induce the surface morphology of a silicon substrate. We provide a new method for the fabrication of a micro/nano-cantilever probe by con...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-05-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/12/5/528 |