Influence of O2 – plasma ambience and growth temperature on the oxidation of Mo-metal and volatilization of oxides
In this communication, we investigated role of the oxygen plasma on the oxidation of Mo strip surface (source of Mo) and volatilization of formed oxide species. Molybdenum oxide thin films are deposited on Si substrate simultaneously by using the volatilized oxide species as vapor source. A special...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2013-09-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.4821284 |