High Frequency FM MEMS Accelerometer Using Piezoresistive Resonators

High Frequency FM MEMS Accelerometer Using Piezoresistive Resonators

A novel frequency modulated (FM) accelerometer based on piezoresistive resonators is presented. The accelerometer uses two differential resonators, connected to the accelerometer proofmass by an amplifying leverage mechanism. The piezoresistive double-mass resonators are electrostatically driven in...

Full description

Bibliographic Details
Main Authors: Cláudia Coelho, João Gaspar, Luís A. Rocha
Format: Article
Language:English
Published: MDPI AG 2018-11-01
Series:Proceedings
Subjects:
MEMS resonant accelerometer
high-frequency accelerometer
piezoresistive resonators stiffness
and thus its resonance frequency
since there are two resonators
the acceleration measure is differential
increasing the device sensitivity
when an external
Online Access:https://www.mdpi.com/2504-3900/2/13/1048

Internet

https://www.mdpi.com/2504-3900/2/13/1048

Similar Items