Material Viscoelasticity-Induced Drift of Micro-Accelerometers

Polymer-based materials are commonly used as an adhesion layer for bonding die chip and substrate in micro-system packaging. Their properties exhibit significant impact on the stability and reliability of micro-devices. The viscoelasticity, one of most important attributes of adhesive materials, is...

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Bibliographic Details
Main Authors: Wu Zhou, Peng Peng, Huijun Yu, Bei Peng, Xiaoping He
Format: Article
Language:English
Published: MDPI AG 2017-09-01
Series:Materials
Subjects:
Online Access:https://www.mdpi.com/1996-1944/10/9/1077