A novel method of quadrature compensation in the butterfly resonator based on modal stiffness analysis
The butterfly gyroscope is simple to manufacture and it is considered as one kind of MEMS gyroscope with high sensitivity due to its unique structure. In reality, fabrication imperfections result in non-ideal geometries in the resonator, which in turn causes the quadrature error. The quadrature erro...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2018-10-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.5042583 |