Influence of the temporal variations of plasma composition on the cyclic formation of dust in hexamethyldisiloxane-argon radiofrequency discharges: Analysis by time-resolved mass spectrometry
Cyclic formation of dust nanoparticles in hexamethyldisiloxane (HMDSO, Si2O(CH3)6)-argon RF discharge with pulsed injection of HMDSO was studied using time-resolved mass spectrometry (MS) and optical emission spectroscopy (OES). A large amount of C2H2, considered as promoter of dust nucleation in hy...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2016-10-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.4966254 |