A reliability model for a wafer FAB

A reliability model for a wafer FAB

Proposed in this paper is a new reliability model for a wafer fabrication plant (FAB). The reliability prediction of a FAB is essential for various activities; feasibility evaluation, comparing competing designs, identifying potential reliability problems, planning maintenance and logistic support s...

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Bibliographic Details
Main Authors:	Joong S. Jang, Sang C. Park
Format:	Article
Language:	English
Published:	Taylor & Francis Group 2017-01-01
Series:	Cogent Engineering
Subjects:	reliability model fab failure rate reliability function simulation
Online Access:	http://dx.doi.org/10.1080/23311916.2017.1340817

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