A reliability model for a wafer FAB
Proposed in this paper is a new reliability model for a wafer fabrication plant (FAB). The reliability prediction of a FAB is essential for various activities; feasibility evaluation, comparing competing designs, identifying potential reliability problems, planning maintenance and logistic support s...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Taylor & Francis Group
2017-01-01
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| Series: | Cogent Engineering |
| Subjects: | |
| Online Access: | http://dx.doi.org/10.1080/23311916.2017.1340817 |