Porous Silicon Sensors- Elusive and Erudite

Porous Silicon Sensors- Elusive and Erudite

Porous Silicon Sensors have been fabricated and tested successfully over the last few years as humidity sensors, vapour sensors, gas sensors, piezoresistive pressure sensors and bio- sensors. In each case it has displayed remarkably sensitivity, relatively low temperature operation and ease of fabri...

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Bibliographic Details
Main Author: H. Saha
Format: Article
Language:English
Published: Exeley Inc. 2008-03-01
Series:International Journal on Smart Sensing and Intelligent Systems
Subjects:
Porous Silicon
Sensing application
Barriers of porous silicon
Online Access:http://www.s2is.org/Issues/v1/n1/papers/paper3.pdf
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spelling doaj-9064ac7e9dcf43fcade966a5e010fce72020-11-24T22:02:59ZengExeley Inc.International Journal on Smart Sensing and Intelligent Systems1178-56082008-03-01113456Porous Silicon Sensors- Elusive and EruditeH. SahaPorous Silicon Sensors have been fabricated and tested successfully over the last few years as humidity sensors, vapour sensors, gas sensors, piezoresistive pressure sensors and bio- sensors. In each case it has displayed remarkably sensitivity, relatively low temperature operation and ease of fabrication. Brief description of fabrication and properties of all these types of different sensors is reported in this paper. The barriers of porous silicon like contact, non- uniformity, instability etc. are also discussed.http://www.s2is.org/Issues/v1/n1/papers/paper3.pdfPorous SiliconSensing applicationBarriers of porous silicon
collection DOAJ
language English
format Article
sources DOAJ
author H. Saha
spellingShingle H. Saha
Porous Silicon Sensors- Elusive and Erudite
International Journal on Smart Sensing and Intelligent Systems
Porous Silicon
Sensing application
Barriers of porous silicon
author_facet H. Saha
author_sort H. Saha
title Porous Silicon Sensors- Elusive and Erudite
title_short Porous Silicon Sensors- Elusive and Erudite
title_full Porous Silicon Sensors- Elusive and Erudite
title_fullStr Porous Silicon Sensors- Elusive and Erudite
title_full_unstemmed Porous Silicon Sensors- Elusive and Erudite
title_sort porous silicon sensors- elusive and erudite
publisher Exeley Inc.
series International Journal on Smart Sensing and Intelligent Systems
issn 1178-5608
publishDate 2008-03-01
description Porous Silicon Sensors have been fabricated and tested successfully over the last few years as humidity sensors, vapour sensors, gas sensors, piezoresistive pressure sensors and bio- sensors. In each case it has displayed remarkably sensitivity, relatively low temperature operation and ease of fabrication. Brief description of fabrication and properties of all these types of different sensors is reported in this paper. The barriers of porous silicon like contact, non- uniformity, instability etc. are also discussed.
topic Porous Silicon
Sensing application
Barriers of porous silicon
url http://www.s2is.org/Issues/v1/n1/papers/paper3.pdf
work_keys_str_mv AT hsaha poroussiliconsensorselusiveanderudite
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