Porous Silicon Sensors- Elusive and Erudite
Porous Silicon Sensors have been fabricated and tested successfully over the last few years as humidity sensors, vapour sensors, gas sensors, piezoresistive pressure sensors and bio- sensors. In each case it has displayed remarkably sensitivity, relatively low temperature operation and ease of fabri...
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| Format: | Article |
| Language: | English |
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Exeley Inc.
2008-03-01
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| Series: | International Journal on Smart Sensing and Intelligent Systems |
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| Online Access: | http://www.s2is.org/Issues/v1/n1/papers/paper3.pdf |