Fabrication and Characterization of Flexible Electrowetting on Dielectrics (EWOD) Microlens

We present a flexible variable-focus converging microlens actuated by electrowetting on dielectric (EWOD). The microlens is made of two immiscible liquids and a soft polymer, polydimethylsiloxane (PDMS). Parylene intermediate layer is used to produce robust flexible electrode on PDMS. A low-temperat...

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Bibliographic Details
Main Authors: Chenhui Li, Hongrui Jiang
Format: Article
Language:English
Published: MDPI AG 2014-07-01
Series:Micromachines
Subjects:
Online Access:http://www.mdpi.com/2072-666X/5/3/432