Toward Characterization of a Rectangular Groove on a Metallic Surface by Multi-Angle Light Scattering
Fast quantitative characterization of a rectangular groove with sizes from sub-micrometers to micrometers on a surface has been demanding in quality control of optical elements. We report a numerical procedure for retrieval of the geometrical parameters of a rectangular groove, including width and d...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2020-01-01
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| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/9046038/ |