SILICON SURFACE MICROSTRUCTURING BY SINGLE-EXPOSURE FEMTOSECOND DOUBLE LASER PULSE
Subject of Research. The paper evaluates the possibility of periodic microstructures formation on the silicon surface by single-exposure double femtosecond laser pulse. Method. We used experimental method of double femtosecond laser pulses based on the Michelson interferometer and theoretical numeri...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Saint Petersburg National Research University of Information Technologies, Mechanics and Optics (ITMO University)
2019-01-01
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| Series: | Naučno-tehničeskij Vestnik Informacionnyh Tehnologij, Mehaniki i Optiki |
| Subjects: | |
| Online Access: | https://ntv.ifmo.ru/file/article/18655.pdf |