Thermo-Mechanical Behavior of a Bilayer Microbeam Subjected to Nonlinear Electrostatic Pressure
In the present work mechanical behavior of a bilayer cantilever microbeam subjected to nonlinear electrostatic pressure and temperature variations has been studied. Nonlinear integro-differential thermo-electro mechanical equation based on Euler-Bernoulli beam theory has been derived and solved usin...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2009-04-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | http://www.sensorsportal.com/HTML/DIGEST/april_09/P_423.pdf |