A Resonant Piezoelectric Diaphragm Pump Transferring Gas with Compact Structure
In order to improve the output capacity of a piezoelectric pump when transferring gas, this paper presents a compact resonant piezoelectric diaphragm pump (hereinafter referred to as the piezoelectric diaphragm pump), which is driven by a rectangular piezoelectric vibrator. The compact structure can...
Main Authors: | , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2016-12-01
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Series: | Micromachines |
Subjects: | |
Online Access: | http://www.mdpi.com/2072-666X/7/12/219 |